@misc{indiciaea3ae024ed4cc,
  title = {Direct-Write Ion Beam Lithography},
  author = {Joshi-Imre, Alexandra and Bauerdick, Sven},
  year = {2014},
  doi = {10.1155/2014/170415},
  url = {https://www.osti.gov/biblio/2280417},
  note = {Source identifier: 2280417}
}