TY  - RPRT
TI  - Direct-Write Ion Beam Lithography
AU  - Joshi-Imre, Alexandra
AU  - Bauerdick, Sven
PY  - 2014
DO  - 10.1155/2014/170415
UR  - https://www.osti.gov/biblio/2280417
ID  - 2280417
ER  -