@misc{indiciae26dae47a7bb7, title = {Beam-steering system based on a MEMS-actuated vertical-coupler array}, author = {Zhang, Xiaosheng and Wu, Ming Chiang A. and Michaels, Andrew S. and Henriksson, Johannes}, year = {2023}, url = {https://www.osti.gov/biblio/2293714}, note = {Source identifier: 2293714} }