TY - RPRT TI - Beam-steering system based on a MEMS-actuated vertical-coupler array AU - Zhang, Xiaosheng AU - Wu, Ming Chiang A. AU - Michaels, Andrew S. AU - Henriksson, Johannes PY - 2023 UR - https://www.osti.gov/biblio/2293714 ID - 2293714 ER -