@misc{indiciae92364c40bd08,
  title = {Method of chemical doping that uses CMOS-compatible processes},
  author = {Misra, Shashank and Ward, Daniel Robert and Campbell, DeAnna Marie and Lu, Tzu-Ming and Schmucker, Scott William and Anderson, Evan Michael and Leenheer, Andrew Jay and Ivie, Jeffrey Andrew},
  year = {2023},
  url = {https://www.osti.gov/biblio/2293772},
  note = {Source identifier: 2293772}
}