@misc{indiciae28c1eee0ae6b,
  title = {Position sensing circuit for an electrostatically driven MEMS device},
  author = {Panas, Robert Matthew and Corral, Princess and Hunter, Steven L. and Paul, Phillip Harris},
  year = {2023},
  url = {https://www.osti.gov/biblio/2293877},
  note = {Source identifier: 2293877}
}