TY  - RPRT
TI  - Position sensing circuit for an electrostatically driven MEMS device
AU  - Panas, Robert Matthew
AU  - Corral, Princess
AU  - Hunter, Steven L.
AU  - Paul, Phillip Harris
PY  - 2023
UR  - https://www.osti.gov/biblio/2293877
ID  - 2293877
ER  -