@misc{indiciaea3b4c58cc99e,
  title = {Patterned nanochannel sacrificial layer for semiconductor substrate reuse},
  author = {Mangum, John Stanley and McMahon, William Edwin and Warren, Emily Lowell and Theingi, San},
  year = {2023},
  url = {https://www.osti.gov/biblio/2293930},
  note = {Source identifier: 2293930}
}