TY  - RPRT
TI  - Patterned nanochannel sacrificial layer for semiconductor substrate reuse
AU  - Mangum, John Stanley
AU  - McMahon, William Edwin
AU  - Warren, Emily Lowell
AU  - Theingi, San
PY  - 2023
UR  - https://www.osti.gov/biblio/2293930
ID  - 2293930
ER  -