@misc{indiciaed59c20bed2d5,
  title = {Offset-aligned three-dimensional integrated circuit},
  author = {Wilkerson, Brett P. and Bhagavat, Milind S. and Agarwal, Rahul and Yudanov, Dmitri},
  year = {2023},
  url = {https://www.osti.gov/biblio/2294014},
  note = {Source identifier: 2294014}
}