@misc{indiciae1a2c62cd5fa8,
  title = {Technological and optical methods for increasing the spatial resolution of thermochemical laser writing on thin metal films},
  author = {Sedukhin, Andrey G. and Mikerin, Sergey L.},
  year = {2019},
  doi = {10.1007/s11082-019-2111-6},
  url = {https://www.osti.gov/biblio/22950039},
  note = {Source identifier: 22950039}
}