TY  - RPRT
TI  - Technological and optical methods for increasing the spatial resolution of thermochemical laser writing on thin metal films
AU  - Sedukhin, Andrey G.
AU  - Mikerin, Sergey L.
PY  - 2019
DO  - 10.1007/s11082-019-2111-6
UR  - https://www.osti.gov/biblio/22950039
ID  - 22950039
ER  -