@misc{indiciaedc2ce40e5974,
  title = {Communication—Controlling Etching of Germanium through Surface Charge Manipulation},
  author = {Wood, Joseph G. and Mitsyuk, Surge and Brayfield, Cassondra and Carpenter, Arthur and Hunt, Charles E. and van Benthem, Klaus (ORCID:000000018865046X)},
  year = {2024},
  doi = {10.1149/1945-7111/ad2647},
  url = {https://www.osti.gov/biblio/2305417},
  note = {Source identifier: 2305417}
}