TY  - RPRT
TI  - Communication—Controlling Etching of Germanium through Surface Charge Manipulation
AU  - Wood, Joseph G.
AU  - Mitsyuk, Surge
AU  - Brayfield, Cassondra
AU  - Carpenter, Arthur
AU  - Hunt, Charles E.
AU  - van Benthem, Klaus (ORCID:000000018865046X)
PY  - 2024
DO  - 10.1149/1945-7111/ad2647
UR  - https://www.osti.gov/biblio/2305417
ID  - 2305417
ER  -