@misc{indiciae6cd999667504,
  title = {Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response},
  author = {Kalaswad, Matias and Custer, Joyce Olsen and Addamane, Sadhvikas Jayachandra and Khan, Ryan Muhammad and Jauregui, Luis Jose and Babuska, Tomas Farley and Henriksen, Amelia A. and DelRio, Frank William and Dingreville, Remi Philippe Michel and Boyce, B. L. and Adams, David P.},
  year = {2023},
  doi = {10.1007/s40192-023-00297-4},
  url = {https://www.osti.gov/biblio/2311620},
  note = {Source identifier: 2311620}
}