TY  - RPRT
TI  - Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response
AU  - Kalaswad, Matias
AU  - Custer, Joyce Olsen
AU  - Addamane, Sadhvikas Jayachandra
AU  - Khan, Ryan Muhammad
AU  - Jauregui, Luis Jose
AU  - Babuska, Tomas Farley
AU  - Henriksen, Amelia A.
AU  - DelRio, Frank William
AU  - Dingreville, Remi Philippe Michel
AU  - Boyce, B. L.
AU  - Adams, David P.
PY  - 2023
DO  - 10.1007/s40192-023-00297-4
UR  - https://www.osti.gov/biblio/2311620
ID  - 2311620
ER  -