@misc{indiciae0168b5079b65, title = {Limiting spectral and angular characteristics of multilayer relief – phase diffraction microstructures}, author = {Greisukh, G. I. and Ezhov, E. G. and Antonov, A. I. and Danilov, V. A.}, year = {2020}, doi = {10.1070/qel17278}, url = {https://www.osti.gov/biblio/23141963}, note = {Source identifier: 23141963} }