TY - RPRT TI - Limiting spectral and angular characteristics of multilayer relief – phase diffraction microstructures AU - Greisukh, G. I. AU - Ezhov, E. G. AU - Antonov, A. I. AU - Danilov, V. A. PY - 2020 DO - 10.1070/qel17278 UR - https://www.osti.gov/biblio/23141963 ID - 23141963 ER -