@misc{indiciae00ee8ad9ae38, title = {Detecting defects that reduce breakdown voltage using machine learning and optical profilometry}, author = {Gallagher, James C. and Mastro, Michael A. and Jacobs, Alan G. and Kaplar, Robert. J. and Hobart, Karl D. and Anderson, Travis J.}, year = {2024}, doi = {10.1038/s41598-024-57875-5}, url = {https://www.osti.gov/biblio/2329528}, note = {Source identifier: 2329528} }