TY  - RPRT
TI  - Detecting defects that reduce breakdown voltage using machine learning and optical profilometry
AU  - Gallagher, James C.
AU  - Mastro, Michael A.
AU  - Jacobs, Alan G.
AU  - Kaplar, Robert. J.
AU  - Hobart, Karl D.
AU  - Anderson, Travis J.
PY  - 2024
DO  - 10.1038/s41598-024-57875-5
UR  - https://www.osti.gov/biblio/2329528
ID  - 2329528
ER  -