@misc{indiciae8b0c05034393,
  title = {Transients using low-high pulsed power in inductively coupled plasmas},
  author = {Qu, Chenhui and Nam, Sang Ki and Kushner, Mark J.},
  year = {2020},
  doi = {10.1088/1361-6595/aba113},
  url = {https://www.osti.gov/biblio/2331468},
  note = {Source identifier: 2331468}
}