TY  - RPRT
TI  - Transients using low-high pulsed power in inductively coupled plasmas
AU  - Qu, Chenhui
AU  - Nam, Sang Ki
AU  - Kushner, Mark J.
PY  - 2020
DO  - 10.1088/1361-6595/aba113
UR  - https://www.osti.gov/biblio/2331468
ID  - 2331468
ER  -