@misc{indiciae27f43735f601, title = {Thermal scanning probe and laser lithography for patterning nanowire based quantum devices}, author = {Shani, Lior and Chaaban, Jana and Nilson, Alec and Clerc, Eliott and Menning, Gavin and Riggert, Colin and Lueb, Pim and Rossi, Marco and Badawy, Ghada and Bakkers, Erik P. A. M. and Pribiag, Vlad S.}, year = {2024}, doi = {10.1088/1361-6528/ad3257}, url = {https://www.osti.gov/biblio/2339874}, note = {Source identifier: 2339874} }