@misc{indiciae513eb3a7c07c,
  title = {Benchmarking of X‐Ray Fluorescence Microscopy with Ion Beam Implanted Samples Showing Detection Sensitivity of Hundreds of Atoms},
  author = {Masteghin, Mateus G. and Gervais, Toussaint and Clowes, Steven K. and Cox, David C. and Zelyk, Veronika and Pattammattel, Ajith and Chu, Yong S. and Kolev, Nikola and Stock, Taylor J. Z. and Curson, Neil J. and Evans, Paul G. and Stuckelberger, Michael and Murdin, Benedict N.},
  year = {2024},
  doi = {10.1002/smtd.202301610},
  url = {https://www.osti.gov/biblio/2345249},
  note = {Source identifier: 2345249}
}