@misc{indiciae9f00b4faa061,
  title = {Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition},
  author = {Rahaman, Mohammad Habibur and Lee, Chang-Min and Buyukkaya, Mustafa Atabey and Harper, Samuel and Islam, Fariba and Addamane, Sadhvikas Jayachandra and Waks, Edo},
  year = {2024},
  doi = {10.1063/5.0190964},
  url = {https://www.osti.gov/biblio/2349191},
  note = {Source identifier: 2349191}
}