TY  - RPRT
TI  - Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition
AU  - Rahaman, Mohammad Habibur
AU  - Lee, Chang-Min
AU  - Buyukkaya, Mustafa Atabey
AU  - Harper, Samuel
AU  - Islam, Fariba
AU  - Addamane, Sadhvikas Jayachandra
AU  - Waks, Edo
PY  - 2024
DO  - 10.1063/5.0190964
UR  - https://www.osti.gov/biblio/2349191
ID  - 2349191
ER  -