@misc{indiciaec6b9019c4835,
  title = {Science challenges and research opportunities for plasma applications in microelectronics},
  author = {Graves, David B. and Labelle, Catherine B. and Kushner, Mark J. and Aydil, Eray S. and Donnelly, Vincent M. and Chang, Jane P. and Mayer, Peter and Overzet, Lawrence and Shannon, Steven and Rauf, Shahid and Ruzic, David N.},
  year = {2024},
  doi = {10.1116/6.0003531},
  url = {https://www.osti.gov/biblio/2349231},
  note = {Source identifier: 2349231}
}