@misc{indiciaeeeb8340c6494,
  title = {A universal metasurface transfer technique for heterogeneous integration},
  author = {Zhang, Xu and Cai, Haogang and Daqiqeh Rezaei, Soroosh and Rosenmann, Daniel and Lopez, Daniel},
  year = {2023},
  doi = {10.1515/nanoph-2022-0627},
  url = {https://www.osti.gov/biblio/2349274},
  note = {Source identifier: 2349274}
}