@misc{indiciaebd1081aef36d, title = {Programmable quantum emitter formation in silicon}, author = {Jhuria, K. (ORCID:000000019270749X) and Ivanov, V. and Polley, D. and Zhiyenbayev, Y. and Liu, W. (ORCID:0000000286374876) and Persaud, A. (ORCID:0000000331868358) and Redjem, W. and Qarony, W. and Parajuli, P. and Ji, Q. and Gonsalves, A. J. and Bokor, J. (ORCID:0000000245410156) and Tan, L. Z. (ORCID:0000000347246369) and Kanté, B. (ORCID:0000000156334163) and Schenkel, T. (ORCID:0000000340469252)}, year = {2024}, doi = {10.1038/s41467-024-48714-2}, url = {https://www.osti.gov/biblio/2367245}, note = {Source identifier: 2367245} }