@misc{indiciae649d3e96eacd,
  title = {Exploring the relationship between deposition method, microstructure, and performance of Nb/Si-based superconducting coplanar waveguide resonators},
  author = {Oh, Jin-Su (ORCID:0000000274623142) and Kopas, Cameron J. and Marshall, Jayss and Fang, Xiaotian and Joshi, Kamal R. (ORCID:0000000204942359) and Datta, Amlan (ORCID:0000000181012457) and Ghimire, Sunil and Park, Joong-Mok and Kim, Richard and Setiawan, Daniel and Lachman, Ella (ORCID:000000016967890X) and Mutus, Joshua Y. and Murthy, Akshay A. (ORCID:0000000176776866) and Grassellino, Anna and Romanenko, Alex and Zasadzinski, John and Wang, Jigang and Prozorov, Ruslan (ORCID:0000000280886096) and Yadavalli, Kameshwar (ORCID:0000000192490382) and Kramer, Matt (ORCID:0000000290976730) and Zhou, Lin (ORCID:0000000322866510)},
  year = {2024},
  doi = {10.1016/j.actamat.2024.120153},
  url = {https://www.osti.gov/biblio/2394612},
  note = {Source identifier: 2394612}
}