@misc{indiciae9df578e0ebc9,
  title = {Post-processing of phase change material in a zero-change commercial silicon photonic process},
  author = {Adya, Uthkarsh and Sturm, Daniel and Chen, Rui (ORCID:000000018492729X) and Wu, Changming and Majumdar, Arka (ORCID:000000030917590X) and Li, Mo (ORCID:0000000255000900) and Moazeni, Sajjad},
  year = {2024},
  doi = {10.1364/oe.526141},
  url = {https://www.osti.gov/biblio/2403564},
  note = {Source identifier: 2403564}
}