TY  - RPRT
TI  - Post-processing of phase change material in a zero-change commercial silicon photonic process
AU  - Adya, Uthkarsh
AU  - Sturm, Daniel
AU  - Chen, Rui (ORCID:000000018492729X)
AU  - Wu, Changming
AU  - Majumdar, Arka (ORCID:000000030917590X)
AU  - Li, Mo (ORCID:0000000255000900)
AU  - Moazeni, Sajjad
PY  - 2024
DO  - 10.1364/oe.526141
UR  - https://www.osti.gov/biblio/2403564
ID  - 2403564
ER  -