@misc{indiciae54bafd01d56a,
  title = {Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings},
  author = {Zorn, Gilad and Salisbury, Joshua and Her, Jae-Hyuk and Rose, Rachel and Shower, Patrick},
  year = {2023},
  doi = {10.1116/6.0002805},
  url = {https://www.osti.gov/biblio/2418237},
  note = {Source identifier: 2418237}
}