TY  - RPRT
TI  - Characterizing the composition, structure, and mechanical properties of magnetron sputtering physical vapor deposition TiN and TiSiN coatings
AU  - Zorn, Gilad
AU  - Salisbury, Joshua
AU  - Her, Jae-Hyuk
AU  - Rose, Rachel
AU  - Shower, Patrick
PY  - 2023
DO  - 10.1116/6.0002805
UR  - https://www.osti.gov/biblio/2418237
ID  - 2418237
ER  -