@misc{indiciaeb331376faa65,
  title = {Atomic layer etching (ALE) of III-nitrides},
  author = {Ho, Wan Ying and Chow, Yi Chao and Biegler, Zachary and Qwah, Kai Shek and Tak, Tanay and Wissel-Garcia, Ashley and Liu, Iris and Wu, Feng and Nakamura, Shuji and Speck, James S.},
  year = {2023},
  doi = {10.1063/5.0159048},
  url = {https://www.osti.gov/biblio/2422395},
  note = {Source identifier: 2422395}
}