@misc{indiciaeabe7166fb512, title = {Tunable Sulfur Incorporation into Atomic Layer Deposition Films Using Solution Anion Exchange}, author = {Lenef, Julia D. and Gayle, Andrew J. and Jo, Jaesung and Fuelling, Kalyn M. and Yadavalli, Srinivas K. and Ortiz-Ortiz, Alondra M. and Sun, Kai and Peterson, Rebecca L. and Dasgupta, Neil P.}, year = {2023}, doi = {10.1021/acs.chemmater.2c03773}, url = {https://www.osti.gov/biblio/2423716}, note = {Source identifier: 2423716} }