@misc{indiciaec7f93afa3608, title = {Silicon Nitride Waveguides with Intrinsic Single-Photon Emitters for Integrated Quantum Photonics}, author = {Senichev, Alexander and Peana, Samuel and Martin, Zachariah O. and Yesilyurt, Omer and Sychev, Demid and Lagutchev, Alexei S. and Boltasseva, Alexandra and Shalaev, Vladimir M.}, year = {2022}, doi = {10.1021/acsphotonics.2c00750}, url = {https://www.osti.gov/biblio/2424077}, note = {Source identifier: 2424077} }