TY - RPRT TI - Silicon Nitride Waveguides with Intrinsic Single-Photon Emitters for Integrated Quantum Photonics AU - Senichev, Alexander AU - Peana, Samuel AU - Martin, Zachariah O. AU - Yesilyurt, Omer AU - Sychev, Demid AU - Lagutchev, Alexei S. AU - Boltasseva, Alexandra AU - Shalaev, Vladimir M. PY - 2022 DO - 10.1021/acsphotonics.2c00750 UR - https://www.osti.gov/biblio/2424077 ID - 2424077 ER -