@misc{indiciaea7f61a28cc8e, title = {Atomic Precision Processing of Two-Dimensional Materials for Next-Generation Microelectronics}, author = {Yoo, Jinkyoung and Nam, Chang-Yong and Bussmann, Ezra}, year = {2024}, doi = {10.1021/acsnano.4c04908}, url = {https://www.osti.gov/biblio/2429294}, note = {Source identifier: 2429294} }