TY - RPRT TI - Atomic Precision Processing of Two-Dimensional Materials for Next-Generation Microelectronics AU - Yoo, Jinkyoung AU - Nam, Chang-Yong AU - Bussmann, Ezra PY - 2024 DO - 10.1021/acsnano.4c04908 UR - https://www.osti.gov/biblio/2429294 ID - 2429294 ER -