@misc{indiciae0c17732e0236, title = {Atomistic mechanisms of silicon nitride crystallization elucidated by molecular dynamics}, author = {Janicki, Tesia Danielle and Chacon, Carlos Manuel and Chiu, Edwin and Gibson, Jason and Grutzik, Scott Joseph and Hattar, Khalid and Hennig, Richard and Parkin, Calvin and Podlevsky, Jennie and Rezwan, Aashique Alam and Bishop, Christopher and Lane, James Matthew Doyle}, year = {2023}, doi = {10.2172/2430401}, url = {https://www.osti.gov/biblio/2430401}, note = {Source identifier: 2430401} }