TY  - RPRT
TI  - Improving Electrical Performance of GaN-on-GaN MOS Devices Via Optimized Atomic Layer Deposition of Al2O3 Gate Dielectrics
AU  - Glaser, Caleb E.
AU  - Rummel, Brian Douglas
AU  - Klesko, Joseph Peter
AU  - Dickens, Peter Thomas
AU  - Binder, Andrew
AU  - Kaplar, Robert
AU  - Feezell, Daniel
PY  - 2023
DO  - 10.2172/2430821
UR  - https://www.osti.gov/biblio/2430821
ID  - 2430821
ER  -