@misc{indiciae1ac54dda26d0, title = {Bayesian optimization-assisted sputter deposition of Molybdenum thin films}, author = {Shrivastava, Ankit and Kalaswad, Matias and Custer, Joyce Olsen and Adams, David P. and Najm, Habib N.}, year = {2023}, doi = {10.2172/2431116}, url = {https://www.osti.gov/biblio/2431116}, note = {Source identifier: 2431116} }