TY  - RPRT
TI  - Bayesian optimization-assisted sputter deposition of Molybdenum thin films
AU  - Shrivastava, Ankit
AU  - Kalaswad, Matias
AU  - Custer, Joyce Olsen
AU  - Adams, David P.
AU  - Najm, Habib N.
PY  - 2023
DO  - 10.2172/2431116
UR  - https://www.osti.gov/biblio/2431116
ID  - 2431116
ER  -