@misc{indiciae623c47acc950, title = {Atomically Precise Fabrication Templated by Hydrogen and Halogen Monolayer Resists}, author = {Butera, Robert and Frederick, Esther and Campbell, Quinn and Schmucker, Scott William and Wheeler, David R. and Misra, Shashank}, year = {2023}, doi = {10.2172/2431182}, url = {https://www.osti.gov/biblio/2431182}, note = {Source identifier: 2431182} }