TY  - RPRT
TI  - Atomically Precise Fabrication Templated by Hydrogen and Halogen Monolayer Resists
AU  - Butera, Robert
AU  - Frederick, Esther
AU  - Campbell, Quinn
AU  - Schmucker, Scott William
AU  - Wheeler, David R.
AU  - Misra, Shashank
PY  - 2023
DO  - 10.2172/2431182
UR  - https://www.osti.gov/biblio/2431182
ID  - 2431182
ER  -