@misc{indiciaefaaf8013e445, title = {Large RF plasma data set for training plasma processing machine learning models}, author = {Fierro, Andrew Steven and Hardin, Thomas James and Lietz, Amanda Marie and Hopkins, Matthew M. and Belianinov, Alex Andrei and Bentz, Brian Zahler}, year = {2023}, doi = {10.2172/2431425}, url = {https://www.osti.gov/biblio/2431425}, note = {Source identifier: 2431425} }