@misc{indiciaeb5c052255bd4, title = {Integrating Si/SiGe quantum devices with on-chip classical circuitry}, author = {Campbell, DeAnna Marie and Wolfe, Michael and Mc junkin, Tom and Friesen, Mark and Eriksson, Mark and Ward, Daniel R. and Tracy, Lisa A.}, year = {2023}, doi = {10.2172/2431725}, url = {https://www.osti.gov/biblio/2431725}, note = {Source identifier: 2431725} }