@misc{indiciae3b7a08badd36,
  title = {Understanding Silicon Nitride Crystallization from Amorphous Deposited Layers with Molecular Dynamics},
  author = {Lane, James Matthew Doyle and Grutzik, Scott Joseph and Hattar, Khalid and Lim, Hojun and Podlevsky, Jennie and Bishop, Christopher and Janicki, Tesia Danielle},
  year = {2023},
  doi = {10.2172/2431777},
  url = {https://www.osti.gov/biblio/2431777},
  note = {Source identifier: 2431777}
}