TY  - RPRT
TI  - Understanding Silicon Nitride Crystallization from Amorphous Deposited Layers with Molecular Dynamics
AU  - Lane, James Matthew Doyle
AU  - Grutzik, Scott Joseph
AU  - Hattar, Khalid
AU  - Lim, Hojun
AU  - Podlevsky, Jennie
AU  - Bishop, Christopher
AU  - Janicki, Tesia Danielle
PY  - 2023
DO  - 10.2172/2431777
UR  - https://www.osti.gov/biblio/2431777
ID  - 2431777
ER  -